Fabrication of 3-D structures with different scales and angles using inclined and bottom side expose method at selected position

Title
Fabrication of 3-D structures with different scales and angles using inclined and bottom side expose method at selected position
Authors
이준섭신현준문성욱송석호김신근
Keywords
감광제; 경사노광; 후면 노광; 3차원 구조물
Issue Date
2003-05
Publisher
제5회 MEMS 학술대회 초록집
Citation
, 145-149
URI
http://pubs.kist.re.kr/handle/201004/10536
Appears in Collections:
KIST Publication > Conference Paper
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