Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Tae Yeop Kim | - |
| dc.contributor.author | Jae Sun Hur | - |
| dc.contributor.author | Moon, Sung Wook | - |
| dc.contributor.author | Shin, Hyun Joon | - |
| dc.contributor.author | Sang Yeol Lee | - |
| dc.date.accessioned | 2024-01-13T10:30:43Z | - |
| dc.date.available | 2024-01-13T10:30:43Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/105670 | - |
| dc.language | English | - |
| dc.subject | Young&apos | - |
| dc.subject | s modulus | - |
| dc.subject | electrostatic actuator | - |
| dc.title | Measuring the Young's modulus of microstructure using parallel plate electrostatic microactuator | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | The 12th Seoul International Symposium on the Physics of Semiconductors and Applications, pp.139 | - |
| dc.citation.title | The 12th Seoul International Symposium on the Physics of Semiconductors and Applications | - |
| dc.citation.startPage | 139 | - |
| dc.citation.endPage | 139 | - |
| dc.citation.conferencePlace | KO | - |
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