A new type thin film bulk acoustic resonator(TFR) using surface micromachining technique

Title
A new type thin film bulk acoustic resonator(TFR) using surface micromachining technique
Authors
김현호이시형주병권이전국오명환김수원
Keywords
thin film resonator; TMAH; surface micromachining; Piezoelectric; AIN
Issue Date
2000-04
Publisher
제2회 MEMS학술대회
Citation
, 173-178
URI
http://pubs.kist.re.kr/handle/201004/10572
Appears in Collections:
KIST Publication > Conference Paper
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