Cu films on Si(100) by partially ionized beam deposition

Title
Cu films on Si(100) by partially ionized beam deposition
Authors
장홍규김기환최성창최두진최원국손용배고석근정형진
Issue Date
1996-01
Publisher
J. ISHM-Korea, The microelectronics society
Citation
VOL 3, NO 2, 17-?
URI
http://pubs.kist.re.kr/handle/201004/10585
Appears in Collections:
KIST Publication > Article
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