Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition..

Title
Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition..
Authors
이광렬김명근조성진은광용성태연
Keywords
electromigration
Issue Date
1997-10
Publisher
Thin solid films.
Citation
VOL 308, 263-267
URI
http://pubs.kist.re.kr/handle/201004/10616
Appears in Collections:
KIST Publication > Article
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