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dc.contributor.author한용희-
dc.contributor.author허재성-
dc.contributor.author최인훈-
dc.contributor.authorKIM GEUN TAE-
dc.contributor.authorShin Hyun Joon-
dc.contributor.author치엔-
dc.contributor.authorMoon Sung Wook-
dc.date.accessioned2024-01-13T11:31:38Z-
dc.date.available2024-01-13T11:31:38Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106262-
dc.languageEnglish-
dc.subject볼로미터-
dc.subjectMEMS-
dc.subject비냉각-
dc.subject바나듐 옥사이드-
dc.titleV₂O5/V/V₂O5 based uncooled infrared detector by MEMS technology-
dc.title.alternativeV₂O5/V/V₂O5 다층박막 및 MEMS 기술을 이용한 비냉각형 적외선 감지 소자의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2003 한국재료학회 춘계학술대회-
dc.citation.title2003 한국재료학회 춘계학술대회-
dc.citation.conferencePlaceKO-
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