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미세구조물 위에 제작된 탄소나노튜브 가스센서의 NH ₃가스 특성 측정 .

Authors

문승일; 장윤택; LEE YUN HI; Soo-Won Kim; Ju Byeong Kwon

Citation

한국 MEMS 학술대회, pp.454 - 457

Keywords

carbon nanotube; gas sensor; microstructure; room temperature

URI

https://pubs.kist.re.kr/handle/201004/106363

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KIST Conference Paper > Others

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