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Surface micromachined microbolometer with the optimized VOx bolometric layer based on the sandwich structure of the V2O5/V/V2O5

Authors

Moon Sung Wook; 한용희; KIM GEUN TAE; Nguyen Chi-Anh; Shin Hyun Joon

Citation

The First International Symposium on Future in Nano-Optoelectronics, pp.53

Keywords

bolometer; vanadium oxide; TCR

URI

https://pubs.kist.re.kr/handle/201004/106527

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KIST Conference Paper > Others

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