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H₂/N₂ mixing plasma pretreatment of sapphire for GaN deposition

Authors

J.K.Kim; Park, Young Ju; D.Byun; E.K.Koh

Citation

The 11th Seoul International Symposium on the Physics of Semiconductors and Applications-2002, pp.62

URI

https://pubs.kist.re.kr/handle/201004/106726

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