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Formation of MoSi₂-Si₃N₄ coatings on Mo substrate by CVD

Authors

YOON JIN KOOK; Byun Ji Young; Kim Gyeung Ho; Kim Jae Soo

Citation

Golden Research Conference ; High Temperature Materials, Processes, and Diagnostics, pp.1071 - 1076

URI

https://pubs.kist.re.kr/handle/201004/106727

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KIST Conference Paper > Others

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