KIST Library Institutional Repository

Low-cost fabrication of high aspect ratio metallic structure for optical switch application using UV-LIGA process

Authors

채경수; 정대석; 김종용; 김태엽; Shin Hyun Joon; 문성옥; OH MYUNG HWAN

Citation

Proceedings of ICEE, pp.1291 - 1294

Keywords

MEMS; UV-LIGA; nickel; optical switch

URI

https://pubs.kist.re.kr/handle/201004/106773

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML