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SiC epi-layer growth using single precursor

Other Titles

단일전구체를 사용한 SiC 박막의 성장

Authors

노대호; Byun Dongjin; Kim Jae Soo; YOON JIN KOOK; 진정근; lee jong kwon

Citation

2002 년도 한국재료학회 추계학술발표강연 및 논문개요집, pp.100

Keywords

단일전구체

URI

https://pubs.kist.re.kr/handle/201004/107220

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KIST Conference Paper > Others

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