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Characteristics of Cu/C films on polymer substrate by ECR chemical vapor deposition

Authors

Lee Joong Kee; JEON BUP JU; Cho Byung Won; Park Dal keun; 고형덕; Byun Dongjin

Citation

Proceedings of 9th APCChE Congress, pp.#500

Keywords

ECR-MOCVD; DC bias; Cu/C films; sheet electric resistance

URI

https://pubs.kist.re.kr/handle/201004/107317

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KIST Conference Paper > Others

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