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Deposition of aluminum nitride thin film by MOCVD using AlCl₃ : BuNH₂ single source precursor

Authors

HAN SUNG HAN; 안창규; 최승철

Citation

Proceedings of 14th International Symposium on the Photo Chemistry and Photophysics of Coordination, pp.?

Keywords

AIN; MOCVD; single precursor; c-axis oriented

URI

https://pubs.kist.re.kr/handle/201004/107513

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KIST Conference Paper > Others

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