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Fabrication, test and simulation of a parylene diaphragm

Authors

심원철; 김대호; KIM KI HOON; 권기영; Kim Byung Kyu; CHOI BUM KU; 양상식; Park Jong Oh

Citation

TRANSDUCERS'01 EUROSENSORS XV The 11th International Conference on Soild-State Sensors and Actuator, pp.1382 - 1385.

Keywords

parylene

URI

https://pubs.kist.re.kr/handle/201004/107608

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KIST Conference Paper > Others

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