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Effect of RF sputtering power in Lipon solid electrolyte ionic conductivity for thin film lithium rechargeable microbatteries

Other Titles

Lithium phosphorous oxy nitride(Lipon) 고체전해질 박막의 이온전도도에 미치는 RF sputtering power 의 효과

Authors

CHOI CHANG HOON; 박호영; NAM SANG CHUL; Yoon Young Soo; Cho Won Il; Cho Byung Won; Yun Kyung Suk; 탁용석

Citation

한국전기화학회 학술발표회 초록집

Keywords

lithium phosphorous Oxy Nitride(lipon); thin film battery

URI

https://pubs.kist.re.kr/handle/201004/107746

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KIST Conference Paper > Others

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