Thermally stable, deep UV resist materials.

Title
Thermally stable, deep UV resist materials.
Authors
안광덕S. R. TurnerC. G. Willson
Issue Date
1987-01
Publisher
Polymers for high technology - electronics and photonics : ACS symposium series
Citation
v. 346, 200-210
URI
http://pubs.kist.re.kr/handle/201004/10776
Appears in Collections:
KIST Publication > Article
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