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A method for the removal of the colloidal silica from CMP wastewater

Other Titles

CMP 폐수중의 콜로이드 실리카 제거 방법의 연구

Authors

JUNG SO YOUN; 김우식; Cho Young Sang

Citation

청정기술 2001 춘계학회 Proceedings, pp.73 - 77

Keywords

콜로이드 실리카; CMP폐수; 폐수처리

URI

https://pubs.kist.re.kr/handle/201004/107776

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KIST Conference Paper > Others

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