Correlation between surface modification of HSQ films and phase transformation of Cu/W-N bilayers deposition on the NH3 plasma treated HSQ films

Authors
김동준심현상박종완Kim Yong TaeKim Seong IlKIM CHUN KEUN
Citation
Material Research Society (MRS) 2001 spring Meeting, pp.231.
Keywords
HSQ
URI
https://pubs.kist.re.kr/handle/201004/107778
Appears in Collections:
KIST Conference Paper > Others
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