Full metadata record

DC Field Value Language
dc.contributor.author이승호-
dc.contributor.authorKIM HEO JEN-
dc.contributor.authorSeong Il Kim-
dc.contributor.author조중열-
dc.contributor.authorY. Nishihara-
dc.contributor.authorPark Young Ju-
dc.date.accessioned2024-01-13T14:31:51Z-
dc.date.available2024-01-13T14:31:51Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107876-
dc.languageEnglish-
dc.subjecthydrogenation-
dc.subjectdefect-
dc.titleLifetime control by low energy electron irradiation and hydrogen annealing-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationthe 8th Kor. Conf. on Semicon., pp.543 - 544-
dc.citation.titlethe 8th Kor. Conf. on Semicon.-
dc.citation.startPage543-
dc.citation.endPage544-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE