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Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage

Authors

JONG-YEON PARK; Kun-Tae Kim; Moon Sung Wook; PARK JEONG HO

Citation

Proceedings of MRS, v.687, pp.113 - 124

Keywords

MRPBI system; UV-lithography; IR sensor; 3D MEMS antenna

URI

https://pubs.kist.re.kr/handle/201004/107935

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KIST Conference Paper > Others

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