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Negative PMER as a novel mold material for UV-LIGA process

Authors

KWON YOUNG AH; 채경수; Jongyong Kim; 정대석; Park Jong Oh; OH MYUNG HWAN; Moon Sung Wook

Citation

Proceedings of the International Sensor Conference 2001, pp.217 - 218

Keywords

PMER; UV-LIGA; negative photoresist

URI

https://pubs.kist.re.kr/handle/201004/108029

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KIST Conference Paper > Others

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