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dc.contributor.author안창규-
dc.contributor.author경제홍-
dc.contributor.authorCHO SEONG HOON-
dc.contributor.authorHAN SUNG HAN-
dc.contributor.author최승철-
dc.contributor.authorJe-Hong Kyoung-
dc.date.accessioned2024-01-13T15:32:53Z-
dc.date.available2024-01-13T15:32:53Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108451-
dc.languageEnglish-
dc.subjectMOCVD-
dc.subjectsingle precursor-
dc.subjectAlN-
dc.titleSingle precursor MOCVD of AlN thin films & the stoichiometry controlling-
dc.title.alternative단일전구체 MOCVD 방법을 통한 AlN 박막증착과 그 조성제어-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2000 년도 한국재료학회 춘계 학술발표강연 및 논문개요집, pp.97-
dc.citation.title2000 년도 한국재료학회 춘계 학술발표강연 및 논문개요집-
dc.citation.startPage97-
dc.citation.endPage97-
dc.citation.conferencePlaceKO-
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