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Review of modified direct current plasma assisted chemical vapour deposition method(DC PACVD) for wafer scale free standing diamond film

Authors

Baik Young Joon; LEE JAE KAP; Lee Wook Seong; EUN KWANG YONG

Citation

The Int. Conf. On Metallurgical Coatings and Thin Films, April 10-14, 2000, San Diego, California, U, pp.?

Keywords

CVD diamond

URI

https://pubs.kist.re.kr/handle/201004/108488

Appears in Collections:

KIST Conference Paper > Others

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