Pulsed DC PACVD process for 4-inch diamond wafer growth

Authors
Lee Wook SeongEUN KWANG YONGBaik Young Joon
Citation
The Int. Conf. On Metallurgical Coatings and Thin Films, April 10-14, 2000, San Diego, California, U, pp.?
Keywords
CVD diamond
URI
https://pubs.kist.re.kr/handle/201004/108492
Appears in Collections:
KIST Conference Paper > Others
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