DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author안창규-
dc.contributor.author최승철-
dc.contributor.authorCHO SEONG HOON-
dc.contributor.authorHAN SUNG HAN-
dc.contributor.author경제홍-
dc.date.accessioned2024-01-13T16:00:44Z-
dc.date.available2024-01-13T16:00:44Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108602-
dc.languageEnglish-
dc.subjectMOCVD-
dc.subjectAlN-
dc.subjectsingle precusor-
dc.titleMOCVD deposition of AlN thin film for packaging materials-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation마이크로전자 및 패키징학회지, v.7, no.1, pp.13-
dc.citation.title마이크로전자 및 패키징학회지-
dc.citation.volume7-
dc.citation.number1-
dc.citation.startPage13-
dc.citation.endPage13-
dc.citation.conferencePlaceKO-
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