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Electrical and structural properties of Si nanocrystals prepared by ion-beam-assisted electron beam deposition

Authors

K.H. Park; Y. Kim; T.H. Chung; H.J. Bark; J.Y. Yi; CHOI WON CHEOL; KIM EUN KYU

Citation

Abstracts of 10th Seoul Inter. Symp. on Phys. of semicon. and Appl., pp.149

Keywords

nanocrystal Si; ion-beam-assisted electron beam deposition; TEM

URI

https://pubs.kist.re.kr/handle/201004/108715

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KIST Conference Paper > Others

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