The fabrication of microlens array

Other Titles
초소형 렌즈 배열의 제작에 관한 연구
Authors
김희연Moon Sung Wook
Citation
한국센서학회
Keywords
microlens array; HNA; bulk etching; SU-8; fill fator; IR derector
URI
https://pubs.kist.re.kr/handle/201004/108750
Appears in Collections:
KIST Conference Paper > Others
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