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Elastic modulus of very thin diamond-like carbon films

Other Titles

극미세 다이아몬드상 카본 필름의 탄성 계수

Authors

정진원; 이철승; 고대홍; 한준희; EUN KWANG YONG; Lee Kwang Ryeol

Citation

제 14 회 재료강도 심포지움 논문집, pp.287 - 299

Keywords

다이아몬드상 카본필름; 박막 탄성계수; free-overhang method

URI

https://pubs.kist.re.kr/handle/201004/108770

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KIST Conference Paper > Others

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