KIST Library Institutional Repository

Study on glass-to-silicon anodic bonding using hydrophilic process

Authors

Ju Byeong Kwon; 이덕중; 장진; OH MYUNG HWAN

Citation

제 7 회 반도체 학술대회, pp.645 - 646

Keywords

wafer bonding

URI

https://pubs.kist.re.kr/handle/201004/108895

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML