KIST Library Institutional Repository

Single precursor MOCVD of aluminum nitride

Authors

경제홍; 최승철; CHO SEONG HOON; HAN SUNG HAN

Citation

Proceedings of Inorganic Chemistry Symposium, v.VI, pp.85 - 86

Keywords

MOCVD; AlN; Single precursor; RBS; AES

URI

https://pubs.kist.re.kr/handle/201004/109028

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML