DSpace at KIST: Thermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O₃ (PZT) thin films

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DC Field	Value	Language
dc.contributor.author	KIM HYUNG JOON	-
dc.contributor.author	오성훈	-
dc.contributor.author	장현명	-
dc.date.accessioned	2024-01-13T17:01:17Z	-
dc.date.available	2024-01-13T17:01:17Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/109172	-
dc.language	English	-
dc.subject	thin film	-
dc.subject	PZT	-
dc.subject	stress	-
dc.subject	Thermodynamic	-
dc.title	Thermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O₃ (PZT) thin films	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	3rd Korea-Japan Conference on Ferroelectrics	-
dc.citation.title	3rd Korea-Japan Conference on Ferroelectrics	-
dc.citation.conferencePlace	KO	-

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