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Improvement of field-emission properties by formation of Nb-silicide layer on silicon-tip FEAs

Authors

J. S. Park; S. Lee; Ju Byeong Kwon; OH MYUNG HWAN; J. Jang; D. Jeon

Citation

SID 99 Digest, pp.576 - 579

Keywords

FED; FEA; MEMS

ISSN

0099-0966

URI

https://pubs.kist.re.kr/handle/201004/109227

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KIST Conference Paper > Others

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