Consideration on the anisotropic etching states of Si and application to the fabrication of micromechanic structures for integrated sensor.

Title
Consideration on the anisotropic etching states of Si and application to the fabrication of micromechanic structures for integrated sensor.
Authors
김형곤오명환주병권이윤희
Issue Date
1990-01
Publisher
전자학회 논문지
Citation
VOL 제 39 권, 75-82
URI
http://pubs.kist.re.kr/handle/201004/10933
Appears in Collections:
KIST Publication > Article
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