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dc.contributor.author조정희-
dc.contributor.authorHAN SEUNG HEE-
dc.contributor.authorLEE YEON HEE-
dc.contributor.author김영우-
dc.contributor.authorLIM HYUN EUI-
dc.contributor.author김곤호-
dc.contributor.author김옥경-
dc.date.accessioned2024-01-13T17:31:02Z-
dc.date.available2024-01-13T17:31:02Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109423-
dc.subjectPSII-
dc.title.alternativeInternal antenna 를 이용한 inductively coupled plasma 내에서 발생된 이온의 존재비율 측정-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 16 회 한국진공학회, pp.166-
dc.citation.title제 16 회 한국진공학회-
dc.citation.startPage166-
dc.citation.endPage166-
dc.citation.conferencePlaceKO-
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