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Measurement of sheath expansion in plasma source ion implantation

Authors

김곤호; 김영우; HAN SEUNG HEE; LEE YEON HEE; 엄한섭; 조정희; 홍문표

Citation

Fifth International Workshop on Plasma-Based Ion Implantation

Keywords

sheath expansion

URI

https://pubs.kist.re.kr/handle/201004/109453

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KIST Conference Paper > Others

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