DSpace at KIST: Fabrication of MEMS based n-polysilicon strain sensor

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DC Field	Value	Language
dc.contributor.author	Kim Tae Song	-
dc.contributor.author	정형진	-
dc.date.accessioned	2024-01-13T17:32:12Z	-
dc.date.available	2024-01-13T17:32:12Z	-
dc.date.created	2021-09-29	-
dc.identifier.issn	1225-3278	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/109494	-
dc.language	English	-
dc.title	Fabrication of MEMS based n-polysilicon strain sensor	-
dc.title.alternative	MEMS 기술에 의한 n-polysilicon 스트레인센서의 제조	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	1999년도 한국센서학회 논문집, v.10, no.1, pp.77 - 80	-
dc.citation.title	1999년도 한국센서학회 논문집	-
dc.citation.volume	10	-
dc.citation.number	1	-
dc.citation.startPage	77	-
dc.citation.endPage	80	-
dc.citation.conferencePlace	KO	-

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