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Fabrication and electrochemical characterization of all solid state thin film micro-battery by in-situ sputtering

Other Titles

In-situ 스퍼터링을 이용한 마이크로 박막 전지의 제작 및 전지 특성 평가

Authors

전은정; 신영화; NAM SANG CHUL; Cho Won Il; SON BONG HEE; Yoon Young Soo

Citation

한국전기전자재료학회 99 추계학술대회 논문집, pp.159 - 162

Keywords

all solid state; thin film micro-battery; in-situ sputtering

URI

https://pubs.kist.re.kr/handle/201004/109500

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KIST Conference Paper > Others

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