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Micro optical switch with self recognition function for displacement using comb actuator

Other Titles

Comb actuator를 이용한 변위 자가 인식 기능의 초소형 광스위치

Authors

Moon, Sung Wook; 채경수; OH MYUNG HWAN; PARK JEONG HO

Citation

99 Photonics Conference, pp.281 - 282

Keywords

comb actuator; 변위 자가 인식 기능; 초소형 광스위치

URI

https://pubs.kist.re.kr/handle/201004/109517

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KIST Conference Paper > Others

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