Study on the batch fabrication of silicon diaphragms

Title
Study on the batch fabrication of silicon diaphragms
Authors
하병주주병권차균현오명환김철주
Issue Date
1991-01
Publisher
전자공학회 추계종합학술대회, 연세대
Citation
VOL 14, NO 2, 361-365
URI
http://pubs.kist.re.kr/handle/201004/10956
Appears in Collections:
KIST Publication > Conference Paper
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