대기압 MOCVD 법을 이용한 AlGaAs/GaAs HEMT 의 제작 .

Title
대기압 MOCVD 법을 이용한 AlGaAs/GaAs HEMT 의 제작 .
Authors
김성일김용엄경숙김무성민석기
Keywords
MOCVD; GaAs; AlGaAs
Issue Date
1991-01
Citation
v. 4, no. 2, 173-178
URI
http://pubs.kist.re.kr/handle/201004/10963
Appears in Collections:
KIST Publication > ETC
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