Heating effect in plasma-enhanced chemical vapor deposition of silicon-nitride.

Title
Heating effect in plasma-enhanced chemical vapor deposition of silicon-nitride.
Authors
강광남이정일J. H. Jo한일기Y. J. Lee
Keywords
silicon-nitride
Issue Date
1991-01
Publisher
Journal of materials science letters
Citation
v. 10, 526-?
URI
http://pubs.kist.re.kr/handle/201004/10969
ISSN
0261-8028
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE