플라즈마화학증착 텅스텐박막의 특성에 미치는 H//2/WF//6 입력비의 역활 .

Title
플라즈마화학증착 텅스텐박막의 특성에 미치는 H//2/WF//6 입력비의 역활 .
Authors
김용태민석기홍종성강태원홍치유
Issue Date
1991-01
Publisher
새물리
Citation
v. 31, 569-573
URI
http://pubs.kist.re.kr/handle/201004/10982
Appears in Collections:
KIST Publication > Article
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