Electrical properties of thin polyimide films prepared by ionized cluster beam deposition.

Title
Electrical properties of thin polyimide films prepared by ionized cluster beam deposition.
Authors
정형진J. K. LeeJ. N. WhangD. H. Lee
Issue Date
1991-01
Publisher
Mat. Res. Soc. Symp. Proc. (Materials science of high temperature polymers for microelectronics)
Citation
v. 227, 225-230
URI
http://pubs.kist.re.kr/handle/201004/10983
Appears in Collections:
KIST Publication > Conference Paper
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