Influence of rapid thermal annealing of cerium oxide on the morphological and electrical properties of metal/ferroelectric/insulator/semiconductor capacitor

Authors
Ho Nyung Lee신동석Kim Yong Tae조성호
Citation
The 4th International Conference on Electronic Materials, pp.?
Keywords
Ferroelectrics
URI
https://pubs.kist.re.kr/handle/201004/109981
Appears in Collections:
KIST Conference Paper > Others
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