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dc.contributor.author박흥우-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박윤권-
dc.contributor.authorPARK JEONG HO-
dc.contributor.author김철주-
dc.contributor.authorSang-Seop Yom-
dc.contributor.authorSUH SANG HEE-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T18:33:04Z-
dc.date.available2024-01-13T18:33:04Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110084-
dc.languageEnglish-
dc.subjectMEMS-
dc.titleSi micromachining for MEMS-IR sensor application-
dc.title.alternative결정의존성 식각/기판접합을 이용한 MEMS용 구조물의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국전기전자재료학회 춘계학술대회 논문집 = Proceedings of the Spring Symposium of KIEEME, pp.411 - 414-
dc.citation.title한국전기전자재료학회 춘계학술대회 논문집 = Proceedings of the Spring Symposium of KIEEME-
dc.citation.startPage411-
dc.citation.endPage414-
dc.citation.conferencePlaceKO-
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