In-situ vacuum packaging method for FEDs in ultra-high-vacuum chamber

Authors
최우범Ju Byeong KwonLEE YUN HI정지원OH MYUNG HWAN정성재LEE NAM YANG한정인조경익성만영
Citation
Proc. SID '98, pp.593 - 596
Keywords
MEMS
ISSN
0098-0966
URI
https://pubs.kist.re.kr/handle/201004/110111
Appears in Collections:
KIST Conference Paper > Others
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