Spectroscopic ellipsometry measurements on the silicon nitride films formed by PECVD in InP.

Title
Spectroscopic ellipsometry measurements on the silicon nitride films formed by PECVD in InP.
Authors
강광남이정일한일기김상열
Keywords
silicon nitride
Issue Date
1991-01
Publisher
한국물리학회 학술발표회 , 전북대
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11012
Appears in Collections:
KIST Publication > Conference Paper
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