Integrated capacitor array effect on the ferroelectric properties for SrBi2Ta2O9 thin films fabricated by the radio frequency magnetron sputtering deposition technique

Title
Integrated capacitor array effect on the ferroelectric properties for SrBi2Ta2O9 thin films fabricated by the radio frequency magnetron sputtering deposition technique
Authors
이전국김태송정형진조광준박종완김형준
Keywords
ferroelectric thin films; rf magnetron sputtering; SrBi2Ta2O9; integrated capacitor array
Issue Date
1998-02
Publisher
Journal of the Korean Physical Society
Citation
VOL 32, S1550-S1552
URI
http://pubs.kist.re.kr/handle/201004/11025
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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