IC 기술을 이용한 자동차용 실리콘 가속센서

Title
IC 기술을 이용한 자동차용 실리콘 가속센서
Authors
주병권오명환
Keywords
MEMS; micromachining; microsensor; acceleration sensor
Issue Date
1991-01
Publisher
전자부품지 .
Citation
, 50
URI
http://pubs.kist.re.kr/handle/201004/11029
Appears in Collections:
KIST Publication > ETC
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